WO2013016305A3 - Component analysis systems and methods - Google Patents

Component analysis systems and methods Download PDF

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Publication number
WO2013016305A3
WO2013016305A3 PCT/US2012/047897 US2012047897W WO2013016305A3 WO 2013016305 A3 WO2013016305 A3 WO 2013016305A3 US 2012047897 W US2012047897 W US 2012047897W WO 2013016305 A3 WO2013016305 A3 WO 2013016305A3
Authority
WO
WIPO (PCT)
Prior art keywords
component
metal layer
vias
signal transition
methods
Prior art date
Application number
PCT/US2012/047897
Other languages
French (fr)
Other versions
WO2013016305A2 (en
Inventor
Wojciech Jakub POPPE
Ilyas Elkin
Puneet Gupta
Original Assignee
Nvidia Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/528,725 external-priority patent/US9425772B2/en
Application filed by Nvidia Corporation filed Critical Nvidia Corporation
Priority to DE112012003071.0T priority Critical patent/DE112012003071T5/en
Priority to CN201280032957.3A priority patent/CN103650345A/en
Publication of WO2013016305A2 publication Critical patent/WO2013016305A2/en
Publication of WO2013016305A3 publication Critical patent/WO2013016305A3/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/027—Generators characterised by the type of circuit or by the means used for producing pulses by the use of logic circuits, with internal or external positive feedback
    • H03K3/03—Astable circuits
    • H03K3/0315—Ring oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31725—Timing aspects, e.g. clock distribution, skew, propagation delay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Component characteristics analysis systems and methods are described. In one embodiment, a ring oscillator comprises: at least one inversion stage operable to cause a signal transition; a target component that has an increased comparative impact or influence on a signal transition propagation in the ring oscillator; and an output component for outputting an indication of the impact the target component has on the signal transition. The target component can include a plurality of vias from one metal layer to another metal layer. The plurality of vias from one metal layer to another metal layer can be configured in a cell. The vias can correspond to a via layer. In one exemplary implementation, the output is coupled to an analysis component. The analysis component can include correlation of the via resistance into a wafer variations and generate a wafer map. The analysis component can include correlation of the via resistance into a wafer.
PCT/US2012/047897 2011-07-22 2012-07-23 Component analysis systems and methods WO2013016305A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112012003071.0T DE112012003071T5 (en) 2011-07-22 2012-07-23 Component analysis systems and methods
CN201280032957.3A CN103650345A (en) 2011-07-22 2012-07-23 Component analysis systems and methods

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US201161511021P 2011-07-22 2011-07-22
US61/511,021 2011-07-22
US201161512362P 2011-07-27 2011-07-27
US61/512,362 2011-07-27
US201161513508P 2011-07-29 2011-07-29
US61/513,508 2011-07-29
US13/528,725 US9425772B2 (en) 2011-07-27 2012-06-20 Coupling resistance and capacitance analysis systems and methods
US13/528,725 2012-06-20

Publications (2)

Publication Number Publication Date
WO2013016305A2 WO2013016305A2 (en) 2013-01-31
WO2013016305A3 true WO2013016305A3 (en) 2013-03-21

Family

ID=47555373

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2012/047897 WO2013016305A2 (en) 2011-07-22 2012-07-23 Component analysis systems and methods

Country Status (5)

Country Link
US (1) US9496853B2 (en)
CN (1) CN103650345A (en)
DE (1) DE112012003071T5 (en)
TW (2) TWI472781B (en)
WO (1) WO2013016305A2 (en)

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Also Published As

Publication number Publication date
US9496853B2 (en) 2016-11-15
WO2013016305A2 (en) 2013-01-31
DE112012003071T5 (en) 2014-04-10
CN103650345A (en) 2014-03-19
TWI592674B (en) 2017-07-21
TW201323896A (en) 2013-06-16
TWI472781B (en) 2015-02-11
US20130021107A1 (en) 2013-01-24
TW201323900A (en) 2013-06-16

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