EP1161654A4 - Mehrschicht-konfokale interferenzmikroskopie mit wellenzahl-domain-reflektometrie und amplitudenreduktion und kompensation - Google Patents

Mehrschicht-konfokale interferenzmikroskopie mit wellenzahl-domain-reflektometrie und amplitudenreduktion und kompensation

Info

Publication number
EP1161654A4
EP1161654A4 EP00918006A EP00918006A EP1161654A4 EP 1161654 A4 EP1161654 A4 EP 1161654A4 EP 00918006 A EP00918006 A EP 00918006A EP 00918006 A EP00918006 A EP 00918006A EP 1161654 A4 EP1161654 A4 EP 1161654A4
Authority
EP
European Patent Office
Prior art keywords
compensation
multiple layer
domain reflectometry
amplitude reduction
wavenumber domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00918006A
Other languages
English (en)
French (fr)
Other versions
EP1161654A1 (de
Inventor
Henry A Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zetetic Institute
Original Assignee
Zetetic Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Institute filed Critical Zetetic Institute
Publication of EP1161654A1 publication Critical patent/EP1161654A1/de
Publication of EP1161654A4 publication Critical patent/EP1161654A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/14—Heads, e.g. forming of the optical beam spot or modulation of the optical beam specially adapted to record on, or to reproduce from, more than one track simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
EP00918006A 1999-03-18 2000-03-16 Mehrschicht-konfokale interferenzmikroskopie mit wellenzahl-domain-reflektometrie und amplitudenreduktion und kompensation Withdrawn EP1161654A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12505799P 1999-03-18 1999-03-18
US125057P 1999-03-18
PCT/US2000/006914 WO2000055572A1 (en) 1999-03-18 2000-03-16 Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation

Publications (2)

Publication Number Publication Date
EP1161654A1 EP1161654A1 (de) 2001-12-12
EP1161654A4 true EP1161654A4 (de) 2006-09-27

Family

ID=22418008

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00918006A Withdrawn EP1161654A4 (de) 1999-03-18 2000-03-16 Mehrschicht-konfokale interferenzmikroskopie mit wellenzahl-domain-reflektometrie und amplitudenreduktion und kompensation

Country Status (5)

Country Link
EP (1) EP1161654A4 (de)
JP (1) JP2002539494A (de)
KR (2) KR20010083041A (de)
CN (1) CN1351705A (de)
WO (1) WO2000055572A1 (de)

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KR20040039882A (ko) * 2002-11-05 2004-05-12 주식회사 대우일렉트로닉스 볼륨 홀로그래픽 데이터 저장 및 재생 시스템
CN103181754A (zh) 2003-10-27 2013-07-03 通用医疗公司 用于使用频域干涉测量法进行光学成像的方法和设备
DE102005006723B3 (de) * 2005-02-03 2006-06-08 Universität Stuttgart Interferometrisches,konfokales Verfahren und interferometrische, konfokale Anordung für optische Datenspeicher, insbesondere Terabyte-Volumenspeicher
CN100451538C (zh) * 2005-07-25 2009-01-14 武汉大学 基于宽带光干涉表面形貌测量方法及其测量仪
ATE516739T1 (de) * 2005-12-06 2011-08-15 Zeiss Carl Meditec Ag Interferometrische probenmessung
JP2008135125A (ja) 2006-11-29 2008-06-12 Ricoh Co Ltd 光学ヘッド、光ディスク装置及び情報処理装置
JP5351042B2 (ja) * 2006-12-18 2013-11-27 ザイゴ コーポレーション 正弦波位相シフト干渉法
CN101911711B (zh) * 2008-01-08 2013-01-09 欧司朗股份有限公司 用于投影至少一个光束的方法和装置
JP2010025864A (ja) * 2008-07-23 2010-02-04 Hamamatsu Photonics Kk 干渉測定装置
JP5532792B2 (ja) * 2009-09-28 2014-06-25 富士通株式会社 表面検査装置及び表面検査方法
US9522396B2 (en) 2010-12-29 2016-12-20 S.D. Sight Diagnostics Ltd. Apparatus and method for automatic detection of pathogens
DE102011013614A1 (de) * 2011-03-08 2012-09-13 Carl Zeiss Microimaging Gmbh Laser-Scanning-Mikroskop und Verfahren zu seinem Betrieb
CN106840812B (zh) 2011-12-29 2019-12-17 思迪赛特诊断有限公司 用于检测生物样品中病原体的方法和系统
JP6125622B2 (ja) * 2012-06-05 2017-05-10 ビー−ナノ リミテッド 電子顕微鏡を用い非真空環境中で材料の分析を行うためのシステムおよび方法
CN104704333B (zh) * 2012-10-05 2017-05-10 国立大学法人香川大学 分光测量装置
US9696264B2 (en) * 2013-04-03 2017-07-04 Kla-Tencor Corporation Apparatus and methods for determining defect depths in vertical stack memory
EP3869257A1 (de) 2013-05-23 2021-08-25 S.D. Sight Diagnostics Ltd. Verfahren und system zur bildgebung einer zellprobe
IL227276A0 (en) 2013-07-01 2014-03-06 Parasight Ltd A method and system for obtaining a monolayer of cells, for use specifically for diagnosis
EP3039477B1 (de) 2013-08-26 2021-10-20 S.D. Sight Diagnostics Ltd. Digitale mikroskopiesysteme, verfahren und computerprogrammprodukte
EP3186778B1 (de) 2014-08-27 2023-01-11 S.D. Sight Diagnostics Ltd. System und verfahren zur berechnung der fokusvariation für ein digitales mikroskop
JP6952683B2 (ja) 2015-09-17 2021-10-20 エス．ディー．サイト ダイアグノスティクス リミテッド 身体試料中の実体を検出する方法および装置
EP3222964B1 (de) * 2016-03-25 2020-01-15 Fogale Nanotech Chromatische konfokale vorrichtung und verfahren zur 2d/3d-inspektion eines objekts wie etwa eines wafers
US11733150B2 (en) 2016-03-30 2023-08-22 S.D. Sight Diagnostics Ltd. Distinguishing between blood sample components
LU93022B1 (de) * 2016-04-08 2017-11-08 Leica Microsystems Verfahren und Mikroskop zum Untersuchen einer Probe
BR112018072627A2 (pt) 2016-05-11 2019-02-19 S D Sight Diagnostics Ltd realização de medições óticas em uma amostra
US11307196B2 (en) 2016-05-11 2022-04-19 S.D. Sight Diagnostics Ltd. Sample carrier for optical measurements
CN106289090B (zh) * 2016-08-24 2018-10-09 广东工业大学 一种牙科树脂内应变场的测量装置
US10481111B2 (en) 2016-10-21 2019-11-19 Kla-Tencor Corporation Calibration of a small angle X-ray scatterometry based metrology system
CA3081669A1 (en) 2017-11-14 2019-05-23 S.D. Sight Diagnostics Ltd Sample carrier for optical measurements
US11573304B2 (en) * 2018-04-27 2023-02-07 Liturex (Guangzhou) Co. Ltd LiDAR device with a dynamic spatial filter
WO2020125935A1 (en) * 2018-12-17 2020-06-25 U-Blox Ag Estimating one or more characteristics of a communications channel

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213706A (en) * 1977-08-19 1980-07-22 The University Of Arizona Foundation Background compensating interferometer
US4304464A (en) * 1977-08-19 1981-12-08 The University Of Arizona Foundation Background compensating interferometer
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5708504A (en) * 1996-10-25 1998-01-13 The United States Of America As Represented By The Secretary Of The Air Force Interfering imaging spectrometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213706A (en) * 1977-08-19 1980-07-22 The University Of Arizona Foundation Background compensating interferometer
US4304464A (en) * 1977-08-19 1981-12-08 The University Of Arizona Foundation Background compensating interferometer
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0055572A1 *

Also Published As

Publication number Publication date
KR20010083041A (ko) 2001-08-31
KR20020034988A (ko) 2002-05-09
CN1351705A (zh) 2002-05-29
JP2002539494A (ja) 2002-11-19
WO2000055572A1 (en) 2000-09-21
EP1161654A1 (de) 2001-12-12

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